Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2016 / 11 Vol. 34; Iss. 6
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Study of alternate hardmasks for extreme ultraviolet patterning
De Silva, Anuja, Seshadri, Indira, Arceo, Abraham, Petrillo, Karen, Meli, Luciana, Mendoza, Brock, Yao, Yiping, Belyansky, Michael, Halle, Scott, Felix, Nelson M.Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4966960
Date:
November, 2016
File:
PDF, 1.39 MB
english, 2016