Effect of the plasma excitation power on the properties of...

Effect of the plasma excitation power on the properties of SiOxCyHz films deposited on AISI 304 steel

Santos, Nazir M., Gonçalves, Thais M., de Amorim, Jayr, Freire, Celia M.A., Bortoleto, José R.R., Durrant, Steven F., Ribeiro, Rafael Parra, Cruz, Nilson C., Rangel, Elidiane C.
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Volume:
311
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2016.12.113
Date:
February, 2017
File:
PDF, 2.48 MB
english, 2017
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