A new setup for localized implantation and live-characterization of keV energy multiply charged ions at the nanoscale
Guillous, S., Bourin, C., Ban D’Etat, B., Benyagoub, A., Cassimi, A., Feierstein, C., Gardés, E., Giglio, E., Girard, S., Grygiel, C., Houel, A., Lebius, H., Méry, A., Monnet, I., Ramillon, J.-M., RanVolume:
87
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4966675
Date:
November, 2016
File:
PDF, 4.50 MB
english, 2016