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AIP Conference Proceedings [Author(s) 30TH INTERNATIONAL SYMPOSIUM ON RAREFIED GAS DYNAMICS: RGD 30 - Victoria, BC, Canada (10–15 July 2016)] - Hybrid kinetic/fluid modeling of silicon nanoparticles dynamics in silane plasma discharges
Orlac’h, J.-M., Giovangigli, V., Novikova, T., Cabarrocas, P. Roca iVolume:
1786
Year:
2016
Language:
english
DOI:
10.1063/1.4967630
File:
PDF, 277 KB
english, 2016