Synergetic effect of chelating agent and nonionic...

Journal of Semiconductors 2016 / 08 Vol. 37; Iss. 8

Synergetic effect of chelating agent and nonionic surfactant for benzotriazole removal on post Cu-CMP cleaning

Li, Yanlei, Liu, Yuling, Wang, Chenwei, Li, Yue
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Volume:
37
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/37/8/086001
Date:
August, 2016
File:
PDF, 2.60 MB
english, 2016
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