Flexible composite stamp for thermal nanoimprint...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2015 / 11 Vol. 33; Iss. 6

Flexible composite stamp for thermal nanoimprint lithography based on OrmoStamp

Papenheim, Marc, Steinberg, Christian, Dhima, Khalid, Wang, Si, Scheer, Hella-Christin
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4929885
Date:
November, 2015
File:
PDF, 1.01 MB
english, 2015
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