Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2016 / 05 Vol. 34; Iss. 3
Depth distribution of Mn in Mn doped GaAs using secondary ion mass spectrometry
Karki, Vijay, Bhattacharya, Debarati, Chandrasekhar Rao, Turumella V., Alamelu, DevanathanVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4943948
Date:
May, 2016
File:
PDF, 1.48 MB
english, 2016