Depth distribution of Mn in Mn doped GaAs using secondary...

Depth distribution of Mn in Mn doped GaAs using secondary ion mass spectrometry

Karki, Vijay, Bhattacharya, Debarati, Chandrasekhar Rao, Turumella V., Alamelu, Devanathan
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4943948
Date:
May, 2016
File:
PDF, 1.48 MB
english, 2016
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