[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Surface Treatment and Functionalization Effects on Chemical Vapor Deposition and Atomic Layer Deposition Grown HfO2
Consiglio, Steven, Mo, Renee, Tai, Tsong-Lin, Krishnan, Siddarth, O'Meara, David, Wajda, Cory, Chudzik, MichaelVolume:
6
Year:
2007
Language:
english
DOI:
10.1149/1.2727400
File:
PDF, 370 KB
english, 2007