Ion chemistry in H 2 -Ar low...

Journal of Applied Physics 2013 / 08 Vol. 114; Iss. 6

Ion chemistry in H 2 -Ar low temperature plasmas

Sode, M., Schwarz-Selinger, T., Jacob, W.
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Volume:
114
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4817526
Date:
August, 2013
File:
PDF, 394 KB
english, 2013
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