Identification of corona discharge-induced SF6oxidation...

Plasma Chemistry and Plasma Processing 1988 / 06 Vol. 8; Iss. 2

Identification of corona discharge-induced SF6oxidation mechanisms using SF6/18O2/H216O and SF6/16O2/H218O gas mixtures

R. J. Van Brunt, M. C. Siddagangappa
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Volume:
8
Language:
english
Pages:
17
DOI:
10.1007/bf01016158
Date:
June, 1988
File:
PDF, 810 KB
english, 1988
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