Morphology, composition and electrical properties of SnO 2 :Cl thin films grown by atomic layer deposition
Cheng, Hsyi-En, Wen, Chia-Hui, Hsu, Ching-MingVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4933328
Date:
January, 2016
File:
PDF, 1.95 MB
english, 2016