Substrate impact on the low-temperature growth of GaN thin films by plasma-assisted atomic layer deposition
Kizir, Seda, Haider, Ali, Biyikli, NecmiVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4953463
Date:
July, 2016
File:
PDF, 1.12 MB
english, 2016