Effect of reactor pressure on the conformal coating inside...

Effect of reactor pressure on the conformal coating inside porous substrates by atomic layer deposition

Poodt, Paul, Mameli, Alfredo, Schulpen, Jeff, Kessels, W. M. M. (Erwin), Roozeboom, Fred
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4973350
Date:
March, 2017
File:
PDF, 1.17 MB
english, 2017
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