Effect of reactor pressure on the conformal coating inside porous substrates by atomic layer deposition
Poodt, Paul, Mameli, Alfredo, Schulpen, Jeff, Kessels, W. M. M. (Erwin), Roozeboom, FredVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4973350
Date:
March, 2017
File:
PDF, 1.17 MB
english, 2017