The Challenge of Measuring Strain in FDSOI Device...

Advanced Engineering Materials 2017 / 01

The Challenge of Measuring Strain in FDSOI Device Structures - HRXRD as a Potential Method of Resolution 

Geisler, Holm, Weisheit, Martin, Hofmann, Petra, Engelmann, Hans-Juergen
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Language:
english
Journal:
Advanced Engineering Materials
DOI:
10.1002/adem.201600744
Date:
January, 2017
File:
PDF, 2.46 MB
english, 2017
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