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Journal of Crystal Growth 2017 / 1

HVPE of aluminum nitride, film evaluation and multiscale modeling of the growth process

Pons, M., Su, J., Chubarov, M., Boichot, R., Mercier, F., Blanquet, E., Giusti, G., Pique, D.
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Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2017.01.002
Date:
January, 2017
File:
PDF, 1.03 MB
english, 2017
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