Flow rate independent sensing of thermal conductivity in a gas stream by a thermal MEMS-sensor – Simulation and experiments
Hepp, Christoph J., Krogmann, Florian T., Urban, Gerald A.Volume:
253
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2016.11.009
Date:
January, 2017
File:
PDF, 2.01 MB
english, 2017