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Effects of laser fluence on silicon modification by four-beam laser interference
Zhao, Le, Wang, Zuobin, Zhang, Jinjin, Yu, Miao, Li, Siwei, Li, Dayou, Yue, YongVolume:
118
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4937579
Date:
December, 2015
File:
PDF, 1.67 MB
english, 2015