Low-temperature self-limiting atomic layer deposition of wurtzite InN on Si(100)
Haider, Ali, Kizir, Seda, Biyikli, NecmiVolume:
6
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.4946786
Date:
April, 2016
File:
PDF, 5.60 MB
english, 2016