Fast charge exchange ions in high power impulse magnetron...

Plasma Sources Science and Technology 2017 / 02 Vol. 26; Iss. 3

Fast charge exchange ions in high power impulse magnetron sputtering of titanium as probes for the electrical potential

Breilmann, W, Maszl, C, Keudell, A von
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Volume:
26
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/aa56e5
Date:
February, 2017
File:
PDF, 891 KB
english, 2017
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