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[IEEE 2016 11th International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM) - Smolenice, Slovakia (2016.11.13-2016.11.16)] 2016 11th International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM) - Simple patterning method of sub-micro- and nanometer structures for gas sensor
Durina, P., Bencurova, A., Truchly, M., Andok, R., Kostic, I., Grancic, B., Plecenik, A., Kus, P., Vutova, K., Koleva, E.Year:
2016
Language:
english
DOI:
10.1109/ASDAM.2016.7805914
File:
PDF, 455 KB
english, 2016