Structural study of β-SiC(001) films on Si(001) by laser...

Journal of the American Ceramic Society 2017 / 04 Vol. 100; Iss. 4

Structural study of β-SiC(001) films on Si(001) by laser chemical vapor deposition

Zhu, Peipei, Xu, Qingfang, Chen, Ruyi, Zhang, Song, Yang, Meijun, Tu, Rong, Zhang, Lianmeng, Goto, Takashi, Yan, Jiasheng, Li, Shusen
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
100
Language:
english
Journal:
Journal of the American Ceramic Society
DOI:
10.1111/jace.14672
Date:
April, 2017
File:
PDF, 1.92 MB
english, 2017
Conversion to is in progress
Conversion to is failed