Zero added oxygen for high quality sputtered ITO: A data...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2016 / 03 Vol. 34; Iss. 2

Zero added oxygen for high quality sputtered ITO: A data science investigation of reduced Sn-content and added Zr

Peshek, Timothy J., Burst, James M., Coutts, Timothy J., Gessert, Timothy A.
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4939830
Date:
March, 2016
File:
PDF, 2.96 MB
english, 2016
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