Characterization of the porosity of silicon nitride thin layers by Electrochemical Impedance Spectroscopy
Barrès, T., Tribollet, B., Stephan, O., Montigaud, H., Boinet, M., Cohin, Y.Volume:
227
Language:
english
Journal:
Electrochimica Acta
DOI:
10.1016/j.electacta.2017.01.008
Date:
February, 2017
File:
PDF, 906 KB
english, 2017