Thermal stability of tungsten sub-nitride thin film prepared by reactive magnetron sputtering
Zhang, X.X., Wu, Y.Z., Mu, B., Qiao, L., Li, W.X., Li, J.J., Wang, P.Volume:
485
Language:
english
Journal:
Journal of Nuclear Materials
DOI:
10.1016/j.jnucmat.2016.12.009
Date:
March, 2017
File:
PDF, 2.04 MB
english, 2017