Surface microstructure profilometry based on laser confocal...

Review of Scientific Instruments 2015 / 10 Vol. 86; Iss. 10

Surface microstructure profilometry based on laser confocal feedback

Wang, Weiping, Zhang, Shulian, Li, Yan
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Volume:
86
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4932938
Date:
October, 2015
File:
PDF, 1.76 MB
english, 2015
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