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Droplet-based, high-brightness extreme ultraviolet laser plasma source for metrology
Vinokhodov, A. Yu., Krivokorytov, M. S., Sidelnikov, Yu. V., Krivtsun, V. M., Medvedev, V. V., Koshelev, K. N.Volume:
120
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4966930
Date:
October, 2016
File:
PDF, 1.30 MB
english, 2016