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An analytical model of multi-component radio frequency capacitively coupled plasma and experimental validation
Saikia, Partha, Bhuyan, Heman, Favre, Mario, Wyndham, Edmundo, Veloso, FelipeVolume:
24
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4973233
Date:
January, 2017
File:
PDF, 1.66 MB
english, 2017