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Evaluation and criterion determination of the low-k thin film adhesion by the surface acoustic waves with cohesive zone model
Xiao, Xia, Qi, Haiyang, Sui, Xiaole, Kikkawa, TakamaroVolume:
399
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2016.12.005
Date:
March, 2017
File:
PDF, 1.89 MB
english, 2017