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Investigation of ultrathin Pt/ZrO2–Al2O3–ZrO2/TiN DRAM capacitors Schottky barrier height by internal photoemission spectroscopy
Lee, Sang Yeon, Chang, Jaewan, Choi, Jaehyung, Kim, Younsoo, Lim, HanJin, Jeon, Hyeongtag, Seo, HyungtakVolume:
17
Language:
english
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2016.12.004
Date:
February, 2017
File:
PDF, 1.10 MB
english, 2017