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Low-temperature Interconnection of PVD-Aluminium Metallization
Geipel, Torsten, Kumm, Julia, Moeller, Monja, Kroely, Laurent, Kraft, Achim, Eitner, Ulrich, Wolf, Andreas, Zhang, Zhenhao, Wohlfahrt, PeterVolume:
98
Language:
english
Journal:
Energy Procedia
DOI:
10.1016/j.egypro.2016.10.088
Date:
November, 2016
File:
PDF, 660 KB
english, 2016