Calculation of deposition conditions for Si3N4from a SiL4-NH3gas phase (L=H, Cl, Br, CH)
J. F. Lartigue, M. Ducarroir, B. ArmasVolume:
19
Language:
english
Pages:
11
DOI:
10.1007/bf01026987
Date:
September, 1984
File:
PDF, 615 KB
english, 1984