Micro-fabricated all optical pressure sensors

Microelectronic Engineering 2017 / 04 Vol. 174

Micro-fabricated all optical pressure sensors

Havreland, Andreas Spandet, Petersen, Søren Dahl, Østergaard, Christian, Reck-Nielsen, Kasper, Thomsen, Erik Vilain
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Volume:
174
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.12.010
Date:
April, 2017
File:
PDF, 1.00 MB
english, 2017
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