Surface modification of single crystal LiTaO3 by H and He...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2017 / 02 Vol. 392

Surface modification of single crystal LiTaO3 by H and He implantation

Ma, Changdong, Lu, Fei, Jin, Lei, Xu, Bo, Fan, Ranran
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Volume:
392
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2016.12.012
Date:
February, 2017
File:
PDF, 1.43 MB
english, 2017
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