Study of surface exfoliation on 6H-SiC induced by H2+...

Physica B: Condensed Matter 2017 / 03 Vol. 508

Study of surface exfoliation on 6H-SiC induced by H2+ implantation

Zhang, L., Li, B.S.
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Volume:
508
Language:
english
Journal:
Physica B: Condensed Matter
DOI:
10.1016/j.physb.2016.12.027
Date:
March, 2017
File:
PDF, 3.12 MB
english, 2017
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