Accurate analytical model for air damping in lateral...

Sensors and Actuators A: Physical 2017 / 03 Vol. 255

Accurate analytical model for air damping in lateral MEMS/MOEMS oscillators

Kainz, A., Hortschitz, W., Steiner, H., Schalko, J., Jachimowicz, A., Keplinger, F.
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Volume:
255
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2016.12.023
Date:
March, 2017
File:
PDF, 1.32 MB
english, 2017
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