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Low temperature humidity sensor based on Ge nanowires selectively grown on suspended microhotplates
Samà, Jordi, Seifner, Michael S., Domènech-Gil, Guillem, Santander, Joaquín, Calaza, Carlos, Moreno, Mauricio, Gràcia, Isabel, Barth, Sven, Romano-Rodríguez, AlbertVolume:
243
Language:
english
Journal:
Sensors and Actuators B: Chemical
DOI:
10.1016/j.snb.2016.12.042
Date:
May, 2017
File:
PDF, 2.52 MB
english, 2017