Adhesion behavior of diamond-like carbon films with F and...

Thin Solid Films 2017 / 01 Vol. 622

Adhesion behavior of diamond-like carbon films with F and Si co-doping prepared by radio frequency reactive magnetron sputtering

Wu, Wei, Zhu, Zhipeng, Min, Jiawei, Zhang, Jiandong, Qian, Non, Jiang, Meifu
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Volume:
622
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.11.043
Date:
January, 2017
File:
PDF, 1.54 MB
english, 2017
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