Solid phase crystallization of germanium films on crystalline silicon
Kuroiwa, Kyota, Kaneko, Tetsuya, Isomura, MasaoVolume:
621
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.11.050
Date:
January, 2017
File:
PDF, 1.28 MB
english, 2017