Low temperature aluminum nitride thin films for sensory applications
Yarar, E., Hrkac, V., Zamponi, C., Piorra, A., Kienle, L., Quandt, E.Volume:
6
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.4959895
Date:
July, 2016
File:
PDF, 2.61 MB
english, 2016