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[IEEE 2016 International Seminar on Sensors, Instrumentation, Measurement and Metrology (ISSIMM) - Malang, Indonesia (2016.8.10-2016.8.11)] 2016 International Seminar on Sensors, Instrumentation, Measurement and Metrology (ISSIMM) - KOH wet etching technique for patterned formation on surface of quartz crystal with AuPd mask
Masruroh,, Santjojo, D.J. Djoko H., Sakti, S. P., Nova, IrnaYear:
2016
Language:
english
DOI:
10.1109/ISSIMM.2016.7803732
File:
PDF, 367 KB
english, 2016