[IEEE 2016 International Seminar on Sensors, Instrumentation, Measurement and Metrology (ISSIMM) - Malang, Indonesia (2016.8.10-2016.8.11)] 2016 International Seminar on Sensors, Instrumentation, Measurement and Metrology (ISSIMM) - KOH wet etching technique for patterned formation on surface of quartz crystal with AuPd mask

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