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Electromagnetic simulation of helicon plasma antennas for their electrostatic shield design
Stratakos, Yorgos, Zeniou, Angelos, Gogolides, EvangelosVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4945001
Date:
May, 2016
File:
PDF, 4.14 MB
english, 2016