Pressure Effect on the Deposition in the a-Si:H Films by...

Microscopy and Microanalysis 2015 / 08 Vol. 21; Iss. S3

Pressure Effect on the Deposition in the a-Si:H Films by PECVD Process for Solar Cell Applications

Plaza-Castillo, J., Garcia-Barrientos, A., Moreno-Moreno, M., Vizcaino, K.Y., Hoyo-Montano, J.A., Valencia-Palomo, G.
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Volume:
21
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927615002287
Date:
August, 2015
File:
PDF, 296 KB
english, 2015
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