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Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
Atosuo, Elisa, Mäntymäki, Miia, Mizohata, Kenichiro, Heikkilä, Mikko J., Räisänen, Jyrki, Ritala, Mikko, Leskelä, MarkkuVolume:
29
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/acs.chemmater.6b03586
Date:
February, 2017
File:
PDF, 2.14 MB
english, 2017