Micro fabrication of lead-free (K,Na)NbO3 piezoelectric...

Micro & Nano Letters 2012 / 12 Vol. 7; Iss. 12

Micro fabrication of lead-free (K,Na)NbO3 piezoelectric thin films by dry etching

Kotera, H., Shibata, K., Kanno, I., Kurokawa, F., Horikiri, F., Mishima, T., Yokokawa, R., Sato, M.
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Volume:
7
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2012.0570
Date:
December, 2012
File:
PDF, 243 KB
english, 2012
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