Influence of porosity on electrical properties of low-k...

Applied Physics Letters 2016 / 09 Vol. 109; Iss. 12

Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation

Choudhury, F. A., Nguyen, H. M., Baklanov, M. R., de Marneffe, J. F., Li, W., Pei, D., Benjamin, D. I., Zheng, H., King, S. W., Lin, Y.-H., Fung, H.-S., Chen, C.-C., Nishi, Y., Shohet, J. L.
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Volume:
109
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4962899
Date:
September, 2016
File:
PDF, 581 KB
english, 2016
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