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[IEEE 2016 IEEE SENSORS - Orlando, FL, USA (2016.10.30-2016.11.3)] 2016 IEEE SENSORS - A single-mass self-resonating closed-loop capacitive MEMS accelerometer
Kose, Talha, Terzioglu, Yunus, Azgin, Kivanc, Akin, TayfunYear:
2016
Language:
english
DOI:
10.1109/ICSENS.2016.7808711
File:
PDF, 1.14 MB
english, 2016