Simulation of p-n junctions: Present and future challenges...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2010 / 01 Vol. 28; Iss. 1

Simulation of p-n junctions: Present and future challenges for technologies beyond 32 nm

Pelaz, Lourdes, Marqués, Luis A., Aboy, María, Santos, Iván, López, Pedro, Duffy, Ray
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Volume:
28
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.3231481
Date:
January, 2010
File:
PDF, 710 KB
english, 2010
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