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SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH
Zhang, Xiaoxian, Myers, John N., Huang, Huai, Shobha, Hosadurga, Chen, Zhan, Grill, AlfredVolume:
119
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4942442
Date:
February, 2016
File:
PDF, 2.10 MB
english, 2016