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[IEEE 2016 IEEE SENSORS - Orlando, FL, USA (2016.10.30-2016.11.3)] 2016 IEEE SENSORS - Fabrication of stress-free MEMS structures with a modified SOI-on-glass
Reddy, Jayaprakash, Pratap, RudraYear:
2016
Language:
english
DOI:
10.1109/ICSENS.2016.7808653
File:
PDF, 800 KB
english, 2016