Quantification of Uncertainty in Creep Failure of RF-MEMS Switches
Kolis, Peter, Bajaj, Anil K., Koslowski, MarisolVolume:
26
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2016.2636841
Date:
February, 2017
File:
PDF, 2.41 MB
english, 2017